Integrated Circuits Fabrication Technologies
| Integrated Circuits Fabrication Technologies | 3 credit 3 hours |
| In this lecture, the following topics will be introduced: 1. Operating modes & theory of MOS devices. 2. Small-geometry effects on MOS devices. 3. Silicon wafer growth. 4. CMOS IC fabrication processes. 5. Photomasks & photolithography. 6. Oxidations. 7. Diffusion & ion implantation. 8. CVD techniques. 9. Evaporation & sputtering. |